Abstract: With the continuous development and utilization of renewable energy and the continuous emergence of efficient energy conversion technologies, the interdependence among power, natural gas, heating and other energy systems is increasly strengthened, and the energy supply system develops in a multi-energy coupling way. Water is one of the most necessary substances in the process of energy production and conversion, while the operation of water pump in the water supply system depends on electric energy drive, thus forming a two-way coupling relationship between the energy supply system and water supply system. By taking an industrial park as the object, and taking its water resources and various energy needs into comprehensive consideration, this paper studies the water-energy coupling system planning of industrial parks, and establishes a water-energy nexus cooperative planning model based on multiple scenarios. At the same time, considering the output uncertainty of the distributed solar power generation in the park, a robust programming method is proposed for the water-energy nexus system to ensure the reliability of energy supply and water supply. The column and constraint generation algorithm is used to solve the robust programming model. The simulation results have verified the validity and rationality of the proposed model. The proposed co-planning can effectively improve the flexibility of the water-energy coupling system, and reduce the cost for investment planning and operation of energy and sources system.